mems微懸臂梁可靠性研究現狀 論文 關鍵詞：MEMS 微懸臂梁 可靠度論文摘要： MEMS(Micro-electronics Mechanical System)的可靠性已經成為它能否成功地實現產品化的一個重要問題。多晶硅微懸臂梁是MEMS中的一個基本結構，作為機電結合的元件，在MEMS中具有不可替代的位置。本文就近年來國內外所開展的有關多晶硅微懸臂梁的在多種失效機理下可靠性研究情況進行了綜述，并對今后這一領域的研究方向進行了展望。Key words: MEMS; micro-cantilever; reliabilityAbstract: The reliability of MEMS is a key problem for its commercial application. Poly—silicon micro—cantilevers is a basic structure, as a combination of mechanical and electrical components, place an irreplaceable part in MEMS. In this paper, at home and abroad in recent years carried out by the relevant silicon micro-cantilever in a variety of the failure mechanism under the reliability of the research are reviewed, The prospective research directions of the Reliability for poly—silicon micro—cantilever in the future are forecasted.
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